TN-L2-MTH WK6-2 XT_ST_CT Theory Day2

Please select the “silent world” components listed below. ( Multi-choice)

• Mirror Block

• Balance Mass – (passive) Damper and Spring

• Projection Lens – Air-mount and Palm

• Reticle chuck

• WS Long Stroke

When WS is already in down position, which hardware needs to be used to shift out WS?

• A+B

• A+C

• B+C

• A+B+C

Which one measures the distance between MB and carrier?

• gravity compensator

• diff sensor

• E-pin

• None

When loading the wafer, Where will WH robot contact to?

• Docking Interface

• Z-actuators

• Wafer Exchange Sensor

• E-pin module

For BM, which statement is correct ?

A - Springs push balance mass to center position.

B - Dampers avoid oscillation of Balance Mass.

• A

• B

• A and B

• None

Which one can measure the dose ?

• A

• B

• C

• D

• E

how many DOF does E-pin have in XT system?

• 6-Dof : X,Y,Rz,Z,Rx,Ry

• 3-Dof : X,Y,Rz

• 3-Dof : Z,Rx,Ry

• 1-Dof : Z

Which one is silent world?

• MF

• BF

• BM

• SF

Which numbers represent "Long Stroke Module" ?

• ABCD

• ABDGI

• ABCDEFG

• BDGIJF

Where is the location of SIOB in WS ?

• WSMR
• WS carrier
• WS supply cabinet
• ELEC