Which sensor does the machine use for WS SS under Metroframe coordinate?

• Diff sensor

• Interferometer

• Encoder

• Herb laser

Which sensor does the machine use for WS SS under Baseframe coordinate?

• Diff sensor

• Interferometer

• Encoder

• Herb laser

Which sensor does the machine use for WS LOS under Metroframe coordinate??

• Diff sensor

• interferometer

• Encoder

• Herb

Which sensor does the machine use for WS LOS (Long Stroke) under Baseframe coordinate?

• diff sensor

• interferometer

• LOS Encoder

• Herb

Which rack processes interferometer signal?

• IFSR+WSRC

• IFSR+MPCR

• MPCR+WSRC

• WSMR+MPCR

How does WS know Lens Position with repect to MF?

• By lens accelerometer

• By Xref and Yref interferometer

• By EZCAP sensor

• By LPA qud cell and LED's

Which rack processes diff sensor signal?

• IFSR

• SPMR

• MPCR

• WSMR

Which statement is wrong?

• A. Diff-sensor will measure the distance between MB and Carrier.

• B. Diff-sensor target is attached to Carrier and Diff-sensor holder is mounted in MB.

• C. There are 3 diff sensors at each chuck.

• D Diff-sensors can measure 6 degree of freedom.

Which statement is true?

• There are 4 corner cubes at chuck1 and 4 zero sensors at measure side.

• There are 3 corner cubes at chuck1 and 3 zero sensors at expose side.

• There are 3 corner cubes at chuck1 and 4 zero sensors at measure side.

• There are 4 corner cubes at chuck1 and 3 zero sensors at expose side.

Which module doesn't have the servo control loop?

• Short Stroke

• Balance Mass

• Long stroke

• Cable suttle