
ECE411_Photolithography
Authored by Sameh Ibrahim
Science
University
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5 questions
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1.
MULTIPLE CHOICE QUESTION
30 sec • 1 pt
What controls the thickness of the photoresist?
The type of the phtoresist.
The speed of rotation.
The direction of rotation.
The duration of coating.
2.
MULTIPLE CHOICE QUESTION
30 sec • 1 pt
Which projection technique is used in modern technolgies?
Proximity
Contact
Projection
3.
MULTIPLE CHOICE QUESTION
30 sec • 1 pt
Which type of ultraviolet light is used in modern semiconductors?
UV
DUV
EUV
4.
MULTIPLE CHOICE QUESTION
30 sec • 1 pt
Adding dog ears is a technique used in which resolution enhancement technique?
Phase Shift Masking (PSM)
Optical Proximity Correction (OPC)
Double Patterning Lithography (DPL)
Immersion
5.
MULTIPLE CHOICE QUESTION
30 sec • 1 pt
Which lithography is used for 3D patterns?
Photolithography
Ion beam lithography
Electron beam lithography
X-ray lithography
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