ECE411_Metal

The problems of Aluminium interconnects include:

• Pitting

• difficult to fabricate

• expensive

• Electromigration

Multiples contact cuts help

• optimize etching time

• reduce step coverage problem

• reduce electromigration

• planarization

Which statement(s) is (are) true?

• Copper conductivity is higher than Aluminum

• Copper conductivity is lower than Aluminum

• Fabricating copper interconnects is an additive process

• Fabricating copper interconnects is a subtractive process

The following processes are needed for copper interconnects:

• Damascene

• Electroplating

• Evaporation

• Sputtering

The following metals are used in Silicidation

• Titanium

• Platinum

• Iron

• Copper