NanoTech 9

According to the Moore law, the number of transistors per area doubles every ...

• 6 months, approximately.
• 1 year, approximately.
• 2 years, approximately.
• 4 years, approximately.

Steve Jobs introduced the first "smart phone" in 2007. Which sensor was not included?

• ambient light sensors.
• proximity sensor.
• accelerometer sensor.
• magnetometer.

What could the accelerometer measure?

• The value and the direction of the gravity.
• The position of the user during running.
• The velocity of the user during running.
• The elevation over the see-level.

Choose the right process sequence of "lift-off" lithography! Surface cleaning -

• metal deposition - resist coating - development - resist removal
• metal deposition - resist coating - metal etching - development
• resist coating - development - metal deposition - resist removal
• resist coating - metal deposition - resist removal

What is the rate determining step of the LPCVD process?

• diffusion of reagents
• adsorption on the solid surface
• chemical surface reaction
• desorption from the solid surface

The crystalline Si can be etched isotropically by

• alkaline wet etching.
• deep reactive ion etching.
• focused ion beam etching.
• acidic wet etching.

Highly anisotropic plasma etching with passivation, polymer etching, Si isotropic etching.

• Reactive Ion Etcing
• Bosch DRIE process
• Cryo DRIE process
• Plasma cleaning

Typical characteristics of the chemical plasma etching

• high selectivity
• high surface adhesion coefficient
• anisotropic angular distribution of incident ion velocity vector
• anisotropic etching profile