Novel NIST Technique Measures 3-D Shapes in Computer Chips Using Optical Microscopy

The video discusses the evolution of computer chips, which now include 3D components to enhance computational power. Traditional optical techniques are insufficient for measuring these complex structures, leading to the development of a new method by Ravi Attota of NIST. This method, called Through Focus Scanning Optical Microscopy (TFSOM), uses optical microscopes in a novel way to accurately measure 3D shapes at the nanoscale. TFSOM is cost-effective, fast, and suitable for industrial needs, offering a significant advantage over traditional electron microscopes. The technique allows for the precise measurement of 3D objects, facilitating advancements in chip manufacturing.

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