WorksheetsTN-L2-MTH WK6-3 XT_ST_CT Theory Day3
Total questions: 10
Worksheet time: 5mins
Which sensor does the machine use for WS SS under Metroframe coordinate?
Diff sensor
Interferometer
Encoder
Herb laser
Which sensor does the machine use for WS SS under Baseframe coordinate?
Diff sensor
Interferometer
Encoder
Herb laser
Which sensor does the machine use for WS LOS under Metroframe coordinate??
Diff sensor
interferometer
Encoder
Herb
Which sensor does the machine use for WS LOS (Long Stroke) under Baseframe coordinate?
diff sensor
interferometer
LOS Encoder
Herb
Which rack processes interferometer signal?
IFSR+WSRC
IFSR+MPCR
MPCR+WSRC
WSMR+MPCR
How does WS know Lens Position with repect to MF?
By lens accelerometer
By Xref and Yref interferometer
By EZCAP sensor
By LPA qud cell and LED's
Which rack processes diff sensor signal?
IFSR
SPMR
MPCR
WSMR
Which statement is wrong?
A. Diff-sensor will measure the distance between MB and Carrier.
B. Diff-sensor target is attached to Carrier and Diff-sensor holder is mounted in MB.
C. There are 3 diff sensors at each chuck.
D Diff-sensors can measure 6 degree of freedom.
Which statement is true?
There are 4 corner cubes at chuck1 and 4 zero sensors at measure side.
There are 3 corner cubes at chuck1 and 3 zero sensors at expose side.
There are 3 corner cubes at chuck1 and 4 zero sensors at measure side.
There are 4 corner cubes at chuck1 and 3 zero sensors at expose side.
Which module doesn't have the servo control loop?
Short Stroke
Balance Mass
Long stroke
Cable suttle
