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FD integration system comparison

Total questions: 10

Worksheet time: 5mins

Name
Class
Date
1.

關於故障檢測集成系統 (FDIS) 的目標,以下哪項陳述是不正確的?

a)

Integrate all Fault Detection (FD) applications into single platform.

b)

Including Unified Variable Analysis (UVA) management or full trace analytics

c)

Retire Enterprise Equipment Engineering (E3)

d)

Integration of workflows and processes

2.

為了實現統一變量分析(UVA)管理功能,(FDIS)部署了以下哪些功能? (多選)

a)

UVA Search

b)

UVA chart display

c)

Alarm Rule Simulation

d)

Limit change workflow

3.

FDIS 的正確別名是什麼?

a)

Fault Detection Integration System

b)

FDC web Integration System

c)

FD Integrated System

d)

Fault Detection Image System

4.

對於Full Trace Analytics 排除列表,哪種描述是正確的?

a)

Process type tied to non-processing chamber.

b)

Trace that are not consistent from wafer within the same process

c)

Tunable parameters

d)

Process type with no expected SVID data collection

e)

All of them

5.

對於Full Trace Analytics 排除列表,哪種描述是正確的?

a)

Coverage on Critical windows only

b)

Does not have OCAP interdiction.

c)

All sensors set in E3 FDC process type.

6.

FDC UVA pattern何者為正確7 種chart type?

a)

Stepped

b)

Cyclical

c)

PM/ CM Drifting

d)

Steady

e)

All of them

7.

關於故障檢測集成系統 (FDIS) 的目標,以下哪項陳述是不正確的?

a)

FDIS stands for Fault Detection Integration System

b)

Current Full trace analytics is including RDA, Metro

c)

The current UVA limit optimization calculation has pattern recognition.

d)


The trace overlay in FDIS has customizable chart splitting and legend selection.

8.

Trace Overlay multiple comparison 最多可以比對多少 group ?

a)

1

b)

2

c)

3

9.

Trace Mining  算法功能增強了哪個部分?

a)

Full Trace Analytics

b)

Cross site analysis& UVA window

c)

Multiple comparison

10.

EMA 比較於 Trace Overlay & Mining系統的優點是?

a)

Multiple comparison conditions can be set at one time.

b)

Need setup Sensor Categorization

c)

EMA has a complete function and can view the differences between rata data & sensor card.