Free Printable AMAT DPSll family introduction(G2/G5/MESA2)

Worksheets

AMAT DPSll family introduction(G2/G5/MESA2)

Total questions: 10

Worksheet time: 5mins

Name

Class

Date

1. MESA2 ESC 有幾個zone ?

2 個

4 個

6 個

2. G5 有沒有bias match?

有

沒有

3.哪一種機型MFC verify是使用Tank?

MESA2

4. MESA2 edge ring 是哪一種?

Ceramic

SIC +Quartz

Quartz

5. G2 lid heater 是哪一種?

3 pieces C shape

2 pieces O shape

2 pieces C shape

6.G5 lid heater 是哪一種?

3 pieces C shape

2 pieces O shape

2 pieces C shape

7.MESA2 lid heater 是哪一種?

3 pieces C shape

2 pieces O shape

2 pieces C shape

8.G2 liner coating 是哪一種?

Y2O3

Anodized

Al2O3

9.MESA2 liner coating是哪一種?

Y2O3

Anodized

Al2O3

10.

10.Flow Equalizer 孔洞比較小是偏Turbo還是Silt Valve?

Turbo

Silt Valve

100 %

AMAT DPSll family introduction(G2/G5/MESA2)

Total questions: 10

Worksheet time: 5mins

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