MEMS

MEMS is an abbreviation of

• Micro Electrical Mechanical System

• Micro Electro Mechanical System

• Both a and b

• None of the above

The core element of MEMS contain

• Sensor/Actuating Element

• Signal Transduction Unit

• Both a and b

• None of the above

MEMS can be used as a microactuator

• True

• False

It involves moving components

• Microelectronics

• Microsystems

The only way to have systems performing multifunctions with manageable sizes is

• Miniaturization

• Microsystems

• Microelectronics

• None of the above

The ideal substrate of MEMS is

• Germanium

• Silicon

• Silicon Carbide

• Gallium Arsenide

A popular method of designating crystal planes and orientations is

• Miller Indices

• FCC

• Lattice

• None of the above

Scaling in geometry is done by considering

• Surface

• Volume

• Both Surface and Volume

• None of the above

The unique matrix to represent force scaling is

• Trimmer Force

• Dynamic Force

• Centrifugal Force

• None of the above

The scaling law which is not frequently used in MEMS and microsystems

• Electrostatic Force

• Electromagnetic Forces

• Rigid body dynamics

• None of the above