
XT CT/WS Mentor week post test
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Professional Development
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20 questions
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1.
MULTIPLE SELECT QUESTION
1 min • 1 pt
On XT, which unit does have nothing to do with IH facilities? (can be multiple)
LCWC
MCWC
WICC
WISC
2.
MULTIPLE CHOICE QUESTION
1 min • 5 pts
Which one is wrong with the full name?
LCWC = Lens Cooling Water Cabinet
RCWC = Rough Cooling Water Cabinet
WVCC = Wet Vacuum Control Cabinet
WISC = Wet Imaging Saving Cabinet
3.
MULTIPLE CHOICE QUESTION
1 min • 5 pts
Which one is wrong?
CA (Clean Air) is coming from ACC (Air Control Cabinet)
Air in subfab will be extracted to ACC
ILCC (In Line Cleaning Cabinet) is used to clean the WVAC line in WS.
LCWC has extra temp sensors and heaters
4.
MULTIPLE SELECT QUESTION
1 min • 5 pts
What is new cabinets from NXT? (can be multiple)
AERC = Auxiliary Electrical Remote Cabinet
XCHAC = eXtreme Clean Humidified Air Cabinet
UPWC = Ultra Pure Water Cabinet
MDC = Main Distribution Cabinet
All is new from NXT
5.
MULTIPLE CHOICE QUESTION
1 min • 5 pts
Math Names for IH MK3
A: LWS
B: LWE
C: GWS
D: NWE
E: AK
F: AKE
A: LWS
B: WVOE
C:SPE
D:GWS
E: AKE
F:AK
A: LWS
B: WVOE
C: GWS
D: SPE
E: AK
F: AKE
6.
MULTIPLE SELECT QUESTION
1 min • 5 pts
Which description is incorrect? (can be multiple)
XT3 type RS uses both LCW and RCW
PCW is routed inside the exposure unit to condition the sub modules
Exhaust system is used to remove particles only from the submodules inside the exposure unit
All Answer is correct
7.
MULTIPLE CHOICE QUESTION
1 min • 5 pts
Which temp. sensor is used during the stabilization of the lens?
Lens temp. sensor
MF temp. sensor
LCW manifold temp. sensor
MCW manifold temp. sensor
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