蝕刻基礎 Part-1
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蝕刻基礎 Part-1
Quiz
•
Physical Ed
•
University
•
Medium
Bruce Cheng
Used 5+ times
FREE Resource
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10 questions
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1.
MULTIPLE CHOICE QUESTION
10 sec • 1 pt
今天來上課的是tsmc 哪一個單位
Fab 12B
RDPC
F15B
F18A
2.
MULTIPLE CHOICE QUESTION
10 sec • 1 pt
今天上課的是哪一個部門
DIFF
CMP
LIT
ETCH
3.
MULTIPLE CHOICE QUESTION
10 sec • 1 pt
Dry Etch前, 通常是哪一個部門負責的製程
LIT
DIFF
CVD
PVD
4.
MULTIPLE CHOICE QUESTION
10 sec • 1 pt
為什麼LIT前需要CMP製程
便宜
平坦化,曝光不會Defocus
效能增強
沒事找事做
5.
MULTIPLE CHOICE QUESTION
10 sec • 1 pt
相對於WET etch, Dry etch 的優勢是 ?
Cost
Throughput
High Selectivity
Shrink Capability
6.
MULTIPLE CHOICE QUESTION
10 sec • 1 pt
Dry Etch 製程中負責Chemical etch的是 ?
Ion
Electron
Radical
Light
7.
MULTIPLE CHOICE QUESTION
10 sec • 1 pt
Dry etch 製程中負責物理轟擊的是 ?
Ion
Light
Radical
Electron
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