KoMiCo coating technology training

1.哪一項不是Coating的目的?

• Increase Part Lifetime

• Better Particle Performance

• For Part Handling Easily

• Chamber Seasoning Time Improvement

2.下列 Coating Method 中 PVD 製程的 Shield 種類適合的 Coating Method是?

• Al-Anodizing

• ARC Spray Coating

• SPS Coating

• AD Coating

3.下列 Coating Method 中, 可在常溫/常壓下鍍膜且又最厚的 Coating是?

• APS Coating

• AD Coating

• PVD Coating

• ALD Coating

4. 下列Coating中, 現行LAM Ceramic TCP Window上應用的Coating是?

• Al-Anodizing

• ARC Spray Coating

• ALD Coating

• AD Coating

5. APS Coating時, 使用Y2O3 Powder的原因是?

• Low Price

• Higher Plasma Resistance

• For hole inside coating uniformity

• Higher mechanical strength

6. APS Coating前, 在底材上進行 Bead Blasting 處理的最大目的是?

• For part thickness decrease

• Increase substrate roughness for higher coating adhesion.

• For particle remove

• Remove moisture.

7. 下列 Coating中, 最適合CVD Shower Head的Hole 內部的Coating是?

• APS Coating

• ARC Spray Coating

• SPS Coating

• ALD Coating

8. Dry-Etch Chamber Coating 時, 使用YF3 或YOF Material的目的是?

• Low Price

• Thin & Dense coating

• Decrease pre-coat process time

• Higher mechanical strength

9. Al-ARC Spray Coating的目的是?

• Surface F element increasing → Seasoning time reduce.

• Surface area increasing → Deposition Increase → PM Extend

• Coating hardness increasing → Coating damage decrease.

• Coating porosity decreasing → Plasma Resistance Increasing

10. Coating layer的 Dense越高 Coating Thickness減少的原因是?

• Density increase → Poor adhesion → peeling

• Density increase → Thermal extension increase → peeling

• Density increase → Particle increase → peeling

• Density increase → Coating layer stress increasing → Peeling