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KoMiCo coating technology training

Authored by Calix Huang

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Professional Development

Used 2+ times

KoMiCo coating technology training
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10 questions

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1.

MULTIPLE CHOICE QUESTION

30 sec • 1 pt

1.哪一項不是Coating的目的?

Increase Part Lifetime

Better Particle Performance

For Part Handling Easily

Chamber Seasoning Time Improvement

2.

MULTIPLE CHOICE QUESTION

30 sec • 1 pt

2.下列 Coating Method 中 PVD 製程的 Shield 種類適合的 Coating Method是?

Al-Anodizing

ARC Spray Coating

SPS Coating

AD Coating

3.

MULTIPLE CHOICE QUESTION

30 sec • 1 pt

3.下列 Coating Method 中, 可在常溫/常壓下鍍膜且又最厚的 Coating是?

APS Coating

AD Coating

PVD Coating

ALD Coating

4.

MULTIPLE CHOICE QUESTION

30 sec • 1 pt

4. 下列Coating中, 現行LAM Ceramic TCP Window上應用的Coating是?

Al-Anodizing

ARC Spray Coating

ALD Coating

AD Coating

5.

MULTIPLE CHOICE QUESTION

30 sec • 1 pt

5. APS Coating時, 使用Y2O3 Powder的原因是?

Low Price

Higher Plasma Resistance

For hole inside coating uniformity

Higher mechanical strength

6.

MULTIPLE CHOICE QUESTION

30 sec • 1 pt

6. APS Coating前, 在底材上進行 Bead Blasting 處理的最大目的是?

For part thickness decrease

Increase substrate roughness for higher coating adhesion.

For particle remove

Remove moisture.

7.

MULTIPLE CHOICE QUESTION

30 sec • 1 pt

7. 下列 Coating中, 最適合CVD Shower Head的Hole 內部的Coating是?

APS Coating

ARC Spray Coating

SPS Coating

ALD Coating

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