WorksheetsKoMiCo coating technology training
Total questions: 10
Worksheet time: 5mins
1.哪一項不是Coating的目的?
Increase Part Lifetime
Better Particle Performance
For Part Handling Easily
Chamber Seasoning Time Improvement
2.下列 Coating Method 中 PVD 製程的 Shield 種類適合的 Coating Method是?
Al-Anodizing
ARC Spray Coating
SPS Coating
AD Coating
3.下列 Coating Method 中, 可在常溫/常壓下鍍膜且又最厚的 Coating是?
APS Coating
AD Coating
PVD Coating
ALD Coating
4. 下列Coating中, 現行LAM Ceramic TCP Window上應用的Coating是?
Al-Anodizing
ARC Spray Coating
ALD Coating
AD Coating
5. APS Coating時, 使用Y2O3 Powder的原因是?
Low Price
Higher Plasma Resistance
For hole inside coating uniformity
Higher mechanical strength
6. APS Coating前, 在底材上進行 Bead Blasting 處理的最大目的是?
For part thickness decrease
Increase substrate roughness for higher coating adhesion.
For particle remove
Remove moisture.
7. 下列 Coating中, 最適合CVD Shower Head的Hole 內部的Coating是?
APS Coating
ARC Spray Coating
SPS Coating
ALD Coating
8. Dry-Etch Chamber Coating 時, 使用YF3 或YOF Material的目的是?
Low Price
Thin & Dense coating
Decrease pre-coat process time
Higher mechanical strength
9. Al-ARC Spray Coating的目的是?
Surface F element increasing → Seasoning time reduce.
Surface area increasing → Deposition Increase → PM Extend
Coating hardness increasing → Coating damage decrease.
Coating porosity decreasing → Plasma Resistance Increasing
10. Coating layer的 Dense越高 Coating Thickness減少的原因是?
Density increase → Poor adhesion → peeling
Density increase → Thermal extension increase → peeling
Density increase → Particle increase → peeling
Density increase → Coating layer stress increasing → Peeling
